Magzine Name :Ieee Transactions On Semiconductor Manufacturing, Frequency :Quarterly
      Volume No       Year       Issue       Month
       15        2002        04        NOVEMBER
       15        2002        03        AUGUST
       15        2002        02        MAY
       15        2002        01        FEBRUARY
       14        2001        04        NOVEMBER
       14        2001        03        AUGUST
       14        2001        02        MAY
       13        2000        04        NOVEMBER
       13        2000        03        AUGUST
       13        2000        02        MAY
       13        2000        01        FEBRUARY