Magzine Name :Ieee Transactions On Semiconductor Manufacturing, Frequency :Quarterly |
Volume No |
Year |
Issue |
Month |
15
|
2002
|
04
|
NOVEMBER
|
15
|
2002
|
03
|
AUGUST
|
15
|
2002
|
02
|
MAY
|
15
|
2002
|
01
|
FEBRUARY
|
14
|
2001
|
04
|
NOVEMBER
|
14
|
2001
|
03
|
AUGUST
|
14
|
2001
|
02
|
MAY
|
13
|
2000
|
04
|
NOVEMBER
|
13
|
2000
|
03
|
AUGUST
|
13
|
2000
|
02
|
MAY
|
13
|
2000
|
01
|
FEBRUARY
|
|
| |